The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 05, 2000
Filed:
Jun. 19, 1998
Koichiro Narimatsu, Hyogo, JP;
Mitsubishi Denki Kabushiki Kaisha, Tokyo, JP;
Abstract
On one of opposing sides of a rectangular prescribed region consisting of element forming regions and a dicing region placed therebetween, a dicing region is formed to have recessed and extended portions which fit recessed and extended portions of another dicing region which is arranged on the other one of the opposing sides. At extended portions of the dicing region, monitor mark regions are arranged corresponding to all four corners of the prescribed region. Therefore, a reticle which can prevent degradation in registration accuracy caused by shot rotation error or shot magnification error without increasing area of the dicing region is provided, and further, method and apparatus for exposure using the reticle are provided.