The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 29, 2000
Filed:
Mar. 17, 1999
Robert G Ozarski, Poway, CA (US);
Cymer, Inc., San Diego, CA (US);
Abstract
A system for providing support for the movement of a laser chamber of a laser system during the installation and removal of the laser chamber from the laser system housing. The system includes a rail assembly that is retractable and extendible from the laser system housing and provides support for moving the laser chamber between an operating position within the housing and a position outside of the housing for removal. The rail assembly is retractable to reside within the housing when not in use. The system may also include at least one actuator for controlling the movement of the laser chamber in a direction having a vertical component. Actuator types that may be used include rotary, piston cylinder, hydraulic, pneumatic, and/or electrical mechanical. One type of rail assembly includes opposing rail structures that retract and extend by moving laterally out from the housing or by pivoting out from the housing. The system may be implemented with a gas laser system such as an excimer laser system.