The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 29, 2000
Filed:
Oct. 08, 1998
Shigeaki Takahashi, Yamanashi-ken, JP;
Yukihiko Fukasawa, Nirasaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A probe method is disclosed which inspects the electrical characteristics of an object to be inspected (wafer W) by bringing the electrodes of the object to be inspected placed on a main chuck and probes of a probe card into contact with each other. The main chuck is movable in the X, Y, Z, and .theta. directions and heated to a predetermined inspection temperature. The main chuck retreats to a position separated from the inspection position during high-temperature inspection. The time (retreat time) during which the main chuck stays retreated is calculated by a retreat time calculating mechanism. A preheat execute determination mechanism determines whether the probe card and probes are to be preheated on the basis of the retreat time. When it is determined that preheating is necessary, a preheat time calculation mechanism calculates the preheat execute time. Preheating is executed during the preheat execute time determined by a preheat end determination mechanism, and misalignment of the probes is corrected.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile