The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 29, 2000
Filed:
Feb. 09, 1995
Applicant:
Inventors:
Recai Sezi, Roettenbach, DE;
Rainer Leuschner, Erlangen, DE;
Horst Borndoerfer, Erlangen, DE;
Michael Sebald, Hessdorf-Hannberg, DE;
Siegfried Birkle, Hoechstadt, DE;
Hellmut Ahne, Roettenbach, DE;
Assignee:
Siemens Aktinegesellschaft, Munchen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03C / ;
U.S. Cl.
CPC ...
4302701 ; 430176 ; 4302711 ; 4302731 ; 430325 ; 430326 ; 430910 ; 522153 ;
Abstract
A photoresist suitable for the production of structures in the submicron range contains the following components: