Capacitive pressure transducer with improved electrode support

Abstract

The disclosed pressure transducer assembly includes a body, a diaphragm, an insulating member, a conductor, a compressed member, and a support member. The body defines an interior cavity. The diaphragm is mounted in the body and divides the interior cavity into a first chamber and a second chamber. A portion of the diaphragm moves in a first direction in response to a pressure in the first chamber being greater than a pressure in the second chamber, and that portion of the diaphragm moves in a second direction opposite the first direction in response to the pressure in the second chamber being greater than the pressure in the first chamber. The conductor is disposed on the insulating member. The insulating member is disposed within the first chamber so that the conductor and the diaphragm form plates of a capacitor. The compressed member is disposed in the first chamber and generates a force that biases the insulating member towards the diaphragm. The support member is disposed between the diaphragm and the insulating member. The support member resists movement of the insulating member towards the diaphragm. The support member is characterized by a thickness and a cross-sectional width. The ratio of the thickness to the cross-sectional width is greater than one.