The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 08, 2000
Filed:
Sep. 12, 1997
Applicant:
Inventor:
John V Schmitt, Sunnyvale, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01F / ;
U.S. Cl.
CPC ...
261 75 ; 118726 ;
Abstract
In a method and apparatus for producing a vapor which serves as a chemical processing material by delivering a carrier gas and a reactive liquid to a vaporizer in which the vapor is produced, the operating state of the vaporizer is monitored by measuring the pressure of the carrier gas being delivered to the vaporizer and producing a detectable indication when the measured pressure exceeds a given value.