The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 25, 2000
Filed:
Jul. 07, 1998
Applicant:
Inventor:
Chung-Chien Lu, Hsinchu, TW;
Assignee:
United Microelectronics Corp., Hsinchu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G08B / ;
U.S. Cl.
CPC ...
340626 ; 340679 ; 36452818 ; 222 55 ; 222 61 ; 222379 ; 702138 ;
Abstract
A dispensing monitor used in a SOG machine to planarize a semiconductor substrate which includes: a container, a gas control valve. a gas release valve, a pressure monitor, and a pressure sensing apparatus. A chemical solution contained in the container is controlled and conveyed through the gas control valve to be sprayed onto the substrate. The pressure monitor and the pressure sensing apparatus and the gas release valve are used for monitoring the internal pressure to keep a constant pressure so that the chemical solution is precisely exported.