The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 18, 2000
Filed:
Dec. 14, 1998
Shimadzu Corporation, Kyoto, JP;
Abstract
A thin film forming apparatus is formed of a vacuum chamber, a base plate holder for holding a base plate near a central part of the vacuum chamber, and ECR plasma generating devices respectively connected to both side portions of the vacuum chamber. A magnetic field generating device is situated adjacent to the vacuum chamber for generating a predetermined magnetic field in the vacuum chamber, and a gas introducing system is connected to the vacuum chamber for introducing a reaction gas into the vacuum chamber. Since the base plate holder has a shape corresponding to an external shape of the base plate, a distance between the base plate and the base plate holder is uniform. The films with uniform thicknesses can be formed on both surfaces of the base plate.