The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 11, 2000
Filed:
Jul. 23, 1997
David V Dudasko, Richardson, TX (US);
George L Streckmann, Dallas, TX (US);
Dennis L Doane, Richardson, TX (US);
Anthony S Leonard, Dallas, TX (US);
Paul G Barker, Dallas, TX (US);
Donald E Russell, Richardson, TX (US);
Texas Instruments Incorporated, Dallas, TX (US);
Abstract
A visual inspection system (10) and method for inspecting the operation of micromechanical devices. The system has a vision system (16), a vision system controller (18), a system controller (20), an illumination system (12), a digital signal processor and a mounting stage (22). The objects undergoing inspection, either wafers or devices, are mounted under the visions system. A probe card is engaged to the object and power is provided. The vision system (16) records which elements or devices on the object begin operating at that voltage. The voltage is then incremented and the process continues until a determination is made as to the objects operability. The system can also be adapted to inspect micromechanical spatial light modulators by generating images with the modulator and capturing them with the image system. The digital signal processor then analyzes the images while the vision system moves to the next object to be inspected.