The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 04, 2000
Filed:
May. 28, 1998
Hirofumi Seki, Hitachi, JP;
Satoshi Ichimura, Hitachi, JP;
Satoshi Takemori, Hitachioota, JP;
Eiji Setoyama, Hitachi, JP;
Kouji Ishiguro, Hitachi, JP;
Yasuhiro Mochizuki, Hitachinaka, JP;
Sensuke Okada, Hitachinaka, JP;
Hajime Murakami, Tomobe-machi, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
Dielectric bodies are arranged in waveguide portions for passing microwave radiation and for holding a plasma generating chamber 25 at a vacuum. The dielectric bodies are arranged to intersect at least an electron cyclotron resonance area of the waveguide portions. A tip end portion of the dielectric bodies at a side of the plasma generating chamber are positioned toward at a side of the plasma generating chamber from an intermediate portion in an axial direction length of a first permanent magnet which is arranged by enclosing an outer periphery of the waveguide portions, and a tip end portion of the dielectric bodies at a side of the plasma generating chamber is substantially consistent with an inner face of the plasma generating chamber.