The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 04, 2000
Filed:
Jul. 02, 1997
Kaihan Abidi Ashtiani, Nanvet, NY (US);
James Anthony Seirmarco, Buchanan, NY (US);
Tokyo Electron Limited, Tokyo, JP;
Abstract
An apparatus and method for processing the surface of a substrate with a plasma formed from a process gas comprises a processing chamber defining a plasma source region and a processing region wherein electrical energy is coupled into the source region to form and sustain a plasma therein, and an ion extraction mechanism positioned between the source region and processing region for extracting ions from the plasma and directing extracted ions and neutral particles into the processing region to process a biased substrate therein. A gas-dispersing element in the processing space disperses a process gas to intersect paths of the extracted ions and to produce charge exchange collisions to create a large number of high-energy neutral particles for processing the workpiece. A radiation-blocking apparatus is positioned between the plasma source region and processing region proximate the ion extraction mechanism and is operable for absorbing damaging radiation produced by the plasma to reduce radiation damage to the substrate.