The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 27, 2000
Filed:
Aug. 11, 1998
Applicant:
Inventors:
Assignees:
Kanto Kagaku Kabushiki Kaisha, Tokyo, JP;
NEC Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C11D / ; C11D / ; C11D / ;
U.S. Cl.
CPC ...
510175 ; 510181 ; 510197 ; 510202 ; 510203 ; 510206 ; 510218 ; 510245 ; 510247 ; 510253 ; 510254 ; 510255 ; 510398 ; 510434 ; 510477 ; 510480 ; 134-12 ; 134-13 ;
Abstract
The present invention relates to a cleaning solution for cleaning substrates, to which a metallic wiring has been applied, being capable of easily removing the metallic impurities of the substrate surface without corroding the metal, not putting a strain on the environment, and not causing a shelf life problem. The cleaning solution comprising at least one member selected from a group consisting of oxalic acid, ammonium oxalate and polyaminocarboxylic acids, but contains no hydrogen fluoride.