The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 27, 2000
Filed:
Aug. 26, 1997
Applicant:
Inventors:
Assignee:
Matsushita Electric Industrial Co., Osaka-fu, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
20419213 ; 20419212 ; 20429803 ; 20429807 ; 20429808 ;
Abstract
A trigger gas feed system is normally kept opened before a discharge is started. The trigger gas feed system is shut instantaneously, for example, when the discharge is generated, thereby to set a vacuum chamber at a sputtering pressure. The trigger gas feed system is opened again after the discharge is finished. The opened state is continued until another discharge is started. Accordingly, the pressure in the vacuum chamber before the discharge is maintained always constant, and the vacuum chamber is returned to the sputtering pressure in a short time.