The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 30, 2000
Filed:
Dec. 16, 1997
Applicant:
Inventors:
Martin M Maxwell, Chandler, AZ (US);
Thomas J Birk, Gilbert, AZ (US);
Assignee:
Intel Corporation, Santa Clara, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
G01R / ; G05D / ;
U.S. Cl.
CPC ...
324760 ; 324765 ; 3241581 ; 279126 ;
Abstract
A pickup chuck which includes a body defining a fluid flow path and a first recess for receiving a semiconductor chip package, at least two chip contact members extending out of the body into the recess, each of which being independently movable in a first direction which is out of the body and in a second direction which is into the body, springs biasing the members into the first direction, flanges limiting movement of each member into the first direction, and one or more heat dissipation fins located within the fluid flow path and engaged with the members to conduct heat therefrom.