The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 30, 2000
Filed:
Dec. 18, 1996
Applicant:
Inventors:
Dae-Woo Kim, Suwon, KR;
Chang-Hyun Lim, Kunsan, KR;
Sang-Kook Choi, Suwon, KR;
Jong-Dae Park, Suwon, KR;
Assignee:
Samsung Electronics Co., Ltd., Suwon, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B66C / ;
U.S. Cl.
CPC ...
294 641 ; 294 871 ;
Abstract
A large diameter wafer conveying system includes a vacuum supplier and a valve unit for ON/OFF controlling a vacuum supplied from the vacuum supplier. A wafer holder stably absorbs and holds a wafer by using the vacuum supplied from the vacuum supplier through the valve unit. A residual vacuum clearer automatically clears a portion of the vacuum which remains after the valve unit is turned OFF to completely remove the vacuum.