The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 23, 2000

Filed:

Sep. 11, 1998
Applicant:
Inventors:

Sadayuki Matsumiya, Kanagawa, JP;

Takao Kawabe, Kanagawa, JP;

Dahai Yu, Kanagawa, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B / ;
U.S. Cl.
CPC ...
356401 ; 356399 ; 356400 ;
Abstract

In an optical measuring apparatus so structured as to hold a CCD camera and a laser displacement gauge so that they can be three-dimensionally driven at the same time on a stage, a jig including two straight, non-parallel line segments which can be measured by the CCD camera and the laser displacement gauge in the projection plane along the Z-axis direction is mounted on the stage; the straight line segments are measured in the projection plane by the CCD camera and the laser displacement gauge to obtain formulas of these segments; the obtained formulas are subjected to the arithmetic operation to calculate an offset value of the X and Y plane coordinate centers between the CCD camera and the laser displacement gauge; and the offset value is used as position calibration data of the CCD camera and the laser displacement gauge to perform position calibration of the measurement data.


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