The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 23, 2000

Filed:

May. 06, 1998
Applicant:
Inventors:

Yukiharu Ohtsuka, Kawasaki, JP;

Yoshio Saruki, Kawasaki, JP;

Yoshio Moriya, Kawasaki, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B / ;
U.S. Cl.
CPC ...
33549 ; 33542 ; 33557 ;
Abstract

A body 1 placed thereon with a table 35 put thereon with an object to be measured W, and a portal frame 41 supporting both ends of rail 43 to the body through pillars 42A and 42B, the rail being placed above the table 35 and extending along a moving direction of a pair of probes 91A and 91B, are provided. A pair of sliders 51A and 51B are movably supported by the rail 43. The pair of the probes are extended downward from the sliders 51A and 51B to be abutted to the object W put on the table 35. The flexural deformation of the probes 91A and 91B is decreased due to the shorter length of the probes 91A and 91B, so that the high accurate measurement is achieved and a relative measurement is omitted.


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