The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 16, 2000

Filed:

Aug. 27, 1997
Applicant:
Inventors:

Hirokazu Matsumoto, Tsukuba, JP;

Kaoru Minoshima, Tsukuba, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B / ;
U.S. Cl.
CPC ...
356357 ; 356360 ; 356363 ;
Abstract

An object is positioned in space by using a beam splitter to split a low-coherence laser light beam into a probe beam and a reference beam. The probe beam is projected at the target object, while the reference beam is reflected by a pair of mirrors synchronized along light paths and scanned at different amplitudes, to form two beams of equal intensity, and light reflected by the object and the interference fringes are detected together to obtain fringe signals with sharpened profile lines.


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