The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 09, 2000
Filed:
Mar. 13, 1998
Akihiko Morita, Kyoto, JP;
Masami Ohtani, Kyoto, JP;
Yasuo Imanishi, Kyoto, JP;
Masao Tsuji, Kyoto, JP;
Masaki Iwami, Kyoto, JP;
Joichi Nishimura, Kyoto, JP;
Kazuhiro Nishimura, Kyoto, JP;
Tetsuya Hamada, Kyoto, JP;
Satoshi Yamamoto, Kyoto, JP;
Kenji Kamei, Kyoto, JP;
Abstract
A substrate processing apparatus reduces an instantaneous maximum power consumption at turn-on. Power receiving parts of a plurality of processing units are connected to one end of a turn-on switch respectively through switches. The other end of the turn-on switch is connected to an external power source through a breaker. Timer values are set in advance in the timers, respectively. When the turn-on switch is turned on, the timers turn on the associated switches respectively after times which are defined by the timer values, whereby the processing units are provided with electric power, each with a delay of a constant time.