The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 09, 2000
Filed:
Jul. 01, 1998
Paul S Thompson, Santee, CA (US);
Cymer, Inc., San Diego, CA (US);
Abstract
A flexible seal permits slidable access to equipment components in an essentially zero clearance environment, without time-consuming disassembly and reassembly. A flexible seal ring includes a thickened radiused boss connected to the outer rim of a flexible flange, connected to a mounting block by an inner hub. The seal ring can be formed as a unitary structure from metal, plastic, elastomer, wood, foam, composite, or combinations thereof. Usually the seal ring has rotational symmetry. Alternatively, the seal ring has an elongated or irregular configuration, e.g. for sealing around a slot. The seal ring can contain an outer o-ring groove. The seal ring is attached to a first plate. A second plate slides laterally to align with the first plate, contacting the flexible seal surface. This presses the seal surface against the second plate, sealing the interface.