The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 25, 2000
Filed:
May. 04, 1998
United Microelectronics Corp., Hsin-Chu, TW;
Abstract
A horizontal oxidation furnace injector comprising an inner tube and an outer tube. The inner tube has an inner tube inlet and an inner tube outlet. The inner tube inlet is used for receiving a first gas and the inner tube outlet is used for outputting the first gas. The outer tube has a branch tube and an outer tube outlet. The branch tube further includes an outer tube inlet. The outer tube inlet is used for receiving a second gas, and the outer tube outlet is used for outputting the secord gas. Furthermore, the outer tube outlet and the inner tube outlet are at the same end. In addition, part of the inner tube is enclosed by the outer tube of the injector while the remainder of the inner tube is exposed, and the inner tube has no bends.