The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 18, 2000
Filed:
Jul. 11, 1997
Applicant:
Inventors:
Robert G Mazur, Sewickley Heights, PA (US);
Robert C Stephenson, North Irwin, PA (US);
Mark J Andy, Aliquippa, PA (US);
Catherine L Hartford, Pittsburgh, PA (US);
John R Rogers, Beaver Falls, PA (US);
Assignee:
Solid State Measurements, Inc., Pittsburgh, PA (US);
Primary Examiner:
Int. Cl.
CPC ...
G01R / ;
U.S. Cl.
CPC ...
702 57 ; 702 65 ; 702117 ; 324715 ; 324757 ; 324758 ; 324765 ; 382145 ;
Abstract
A system for automatic spreading resistance profiling of wafer specimens. The system comprises a positioning stage for positioning the specimens for contact by probe tips and alternately a probe conditioning fixture or a sample calibration fixture. The system further comprises a programmed computer for controlling the positioning stage to effect automatic specimen profiling, probe tip conditioning, and calibration.