The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 18, 2000
Filed:
Jun. 30, 1997
Applicant:
Inventor:
Robert Ploessl, Glen Allen, VA (US);
Assignee:
Siemens Aktiengesellschaft, Munich, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ; H01L / ;
U.S. Cl.
CPC ...
438690 ; 438692 ; 438694 ; 438700 ; 438702 ; 438759 ; 438778 ;
Abstract
A method of forming very small diameter metal lines in a dielectric layer 12 comprising forming an opening in the dielectric layer using photolithographic techniques, filling the opening with an insulating material 16 and planarizing the dielectric layer using chemical metal polishing techniques, which are continued so as to form small trenches 17 in the dielectric material on either side of the insulating material, filling in the trenches with metal and planarizing the metal layer using chemical metal polishing.