The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 11, 2000
Filed:
Mar. 10, 1998
Applicant:
Inventors:
Shuichi Hashimoto, Tokyo, JP;
Masashi Fujimoto, Tokyo, JP;
Assignee:
NEC Corporation, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
G03F / ;
U.S. Cl.
CPC ...
430-5 ;
Abstract
In a mask including an optical shield layer formed on a transparent substrate, the light transmittance of the shield layer is changed in accordance with the density of patterns of the shield layer or the thickness of a photoresist layer on a semiconductor substrate.
Quick Actions:
Hashimoto, Shuichi. (2000). Mask including optical shield layer having variable light transmittance (U.S. Patent No. 6048648). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6048648
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile