The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 04, 2000
Filed:
Dec. 23, 1997
Applicant:
Inventors:
Sergei Cheprasov, Niles, IL (US);
Gordon J Grosslight, Westcliffe, CO (US);
Assignee:
Speedfam Corporation, Chandler, AZ (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B24B / ;
U.S. Cl.
CPC ...
451-5 ;
Abstract
Improved manufacture of thin-film magnetic heads includes a piezoelectric driven actuator for bending row tools used in the mass manufacture of magnetic heads. The actuator is independent of the row tool and includes a lever arm which structurally deflects when driven by the piezoelectric element, converting physical displacement of the piezoelectric element to a force supplied to the row tool, through a portion of the lever arm arranged to undergo deflection. Arrays of piezoelectric actuators are also disclosed for individual adjustment of each magnetic head component of a row being polished.