The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 28, 2000
Filed:
Jan. 02, 1998
Applicant:
Inventors:
Glenn Baldwin Alers, Santa Cruz, CA (US);
Kathleen Susan Krisch, New Providence, NJ (US);
Bonnie Elaine Weir, Bronxville, NY (US);
Assignee:
Other;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R / ;
U.S. Cl.
CPC ...
324520 ; 324765 ; 324613 ;
Abstract
The breakdown of an ultra-thin dielectric layer is detected by applying a test signal to the layer. Measurements are taken of noise signals present in the layer during the application of the test signal. At breakdown, a significant increase occurs in the amplitude of the measured noise signals. Similarly, fluctuations in quiescent current, I.sub.DDQ, (I.sub.DDQ noise signals), rather than the values of I.sub.DDQ, are utilized during testing as the basis for detecting defects in integrated circuits.