The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 28, 2000

Filed:

Apr. 15, 1997
Applicant:
Inventors:

Masakazu Shimada, Hachioji, JP;

Takashi Nagano, Tokyo, JP;

Takashi Yoneyama, Hachioji, JP;

Nobuyuki Nagasawa, Hachioji, JP;

Hideaki Endo, Hachioji, JP;

Jitsunari Kojima, Ina, JP;

Atsuhiro Tsuchiya, Hachioji, JP;

Yukiko Saeki, Fukuoka, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B / ;
U.S. Cl.
CPC ...
2502013 ; 252014 ;
Abstract

A focal point adjustment apparatus applied to an optical apparatus with a projection optical system, comprises, an object lens, a stage on which a plate member on which a subject is put for measurement is placed, provision unit for providing the thickness of the plate member for measurement, determining unit for determining data on the distance between the object lens and the stage on the basis of the thickness of the plate member for measurement provided by the provision unit, and focusing unit for adjusting the distance between the object lens and the stage on the basis of the data on the distance between the object lens and the stage determined by the determining unit.


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