The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 28, 2000
Filed:
Mar. 10, 1998
Applicant:
Inventors:
Sharath D Hosali, Newark, DE (US);
Anantha R Sethuraman, Avondale, PA (US);
Jiun-Fang Wang, Hockessin, DE (US);
Lee Melbourne Cook, Steelville, PA (US);
Assignee:
Rodel Holdings, Inc., Wilmington, DE (US);
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C09K / ; C09K / ;
U.S. Cl.
CPC ...
252 791 ; 252 794 ;
Abstract
A composition is provided for polishing a composite comprised of silica and silicon nitride comprising: an aqueous medium, abrasive particles, a surfactant, and a compound which complexes with the silica and silicon nitride wherein the complexing agent has two or more functional groups each having a dissociable proton, the functional groups being the same or different.