Cleaning apparatus

Abstract

A cleaning apparatus enables a workpiece to be rotated at a high speed over a long period, enables the outer and inner circumferences of the workpiece to be cleaned by a simple structure without provision of a special mechanism, and enables avoidance of formation of scratches in the radial direction of the workpiece. Chuck members 1-1 to 1-3 for chucking the outer periphery of a magnetic disk W are driven to rotate by a brush rotation mechanism 4 and are made to rock back and forth in the radial direction of the magnetic disk W by a rocking portion 6 of the brush rotation mechanism 4. Specifically, the rollers 12 of the chuck members 1-1 to 1-3 are formed by polyurethane foam and a plurality of circumferential grooves 14 are formed in the surface of the rollers 12. The rod-shaped brushes 3-1 and 3-2 are formed by attaching sponges 32 having a large number of bumps 30 to the front ends of shafts 31. The rocking portion 6 makes the sponges 32 rock back and forth so that the bumps 30 at the front end swing out to the inner circumference side of the magnetic disk W and the bumps 30 at the rear end swing out to the outer circumference side of the magnetic disk W.