The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 21, 2000
Filed:
Apr. 08, 1997
Applicant:
Inventors:
Mikihiro Kimura, Tokyo, JP;
Masahiro Sekine, Tokyo, JP;
Assignee:
Mitsubishi Denki Kabushiki Kaisha, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
G01R / ; H01L / ;
U.S. Cl.
CPC ...
438 17 ; 438 18 ;
Abstract
An A1 pad (11) is provided on a field oxide film isolation (5). The A1 pad (11) is electrically connected to a gate electrode (7) with an A1 wiring pattern (10) and the like. In measurement, a probe (3) comes into contact with the A1 pad (11) to apply a voltage thereto. The probe (3) does not come into direct contact with the gate electrode (7), and therefore no stress is applied to a region below a gate insulation film (6) in which a depletion layer is to be created. With this structure, more accurate result is obtained in a test of estimating defects at an isolation edge using a C-t measurement method.