The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 21, 2000
Filed:
Apr. 09, 1998
Raymond K Lam, Park Ridge, NJ (US);
Charles E Melin, Bogota, NJ (US);
Guiseppe Colella, Orangeburg, NY (US);
Sony Corporation, Tokyo, JP;
Materials Research Corporation, Orangeburg, NY (US);
Abstract
The present invention relates to a method of manufacturing high purity chromium suitable for deposition onto a semiconductor wafer or other substrate by sputtering. The process increases productivity, expands melting capability and provides consistent high purity chromium by reducing contamination by the dissolution of crucible material. The present invention provides for the addition of chromium oxide (Cr.sub.2 O.sub.3) to control oxygen content in chromium thereby producing high purity chromium ingots and protecting the ceramic crucibles from chemical attack by the liquid chromium.