The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 14, 2000
Filed:
Jan. 29, 1998
Applicant:
Inventor:
Ronald A Warren, Essex Junction, VT (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
20419212 ; 20419213 ; 2041923 ; 20419232 ; 20419223 ; 20419225 ; 20429803 ; 20429809 ; 20429811 ; 20429815 ; 20429825 ; 20429826 ; 20429827 ; 20429828 ; 20429831 ; 20429832 ; 20429835 ; 20429829 ;
Abstract
A sputtering apparatus using a collimator disposed between a wafer holder for holding a wafer and a target to intercept some of the particles ejected from the target, wherein the collimator is movable in a direction parallel to the wafer surface in a manner permitting the collimator to be cleaned and maintained in situ simultaneous with sputtering deposition processing.