The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 07, 2000
Filed:
Mar. 04, 1998
Applicant:
Inventors:
Koji Kishimoto, Tokyo, JP;
Kenichi Koyanagi, Tokyo, JP;
Assignee:
NEC Corporation, Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ; H01L / ;
U.S. Cl.
CPC ...
438710 ;
Abstract
A method for fabricating a semiconductor device on a silicon substrate comprises the step of high-frequency plasma-treatment for through-hole before filling the through-hole with a metallic layer for connection. The plasma contains argon, oxygen and hydrogen atoms wherein the ratio of oxygen atoms to the total of the oxygen and hydrogen atoms in number is between 1/3 and 1/100. The silicon substrate is applied with a high-frequency bias voltage during the plasma treatment for acceleration of argon ion.