The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 29, 2000
Filed:
Feb. 25, 1998
Applicant:
Inventors:
Juergen Kurle, Reutlingen, DE;
Karsten Funk, Stuttgart, DE;
Franz Laermer, Stuttgart, DE;
Michael Offenberg, Tuebingen, DE;
Andrea Schilp, Schwaebisch Gmuend, DE;
Assignee:
Robert Bosch GmbH, Stuttgart, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01L / ; H01L / ;
U.S. Cl.
CPC ...
438 48 ; 73777 ; 73 1401 ; 7351435 ; 7351432 ; 361280 ;
Abstract
In a sensor and a method for manufacturing a sensor, a movable element is patterned out of a silicon layer and is secured to a substrate. The conducting layer is subdivided into various regions, which are electrically insulated from one another. The electrical connection between the various regions of the silicon layer is established by a conducting layer, which is arranged between a first and a second insulating layer.