The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 22, 2000
Filed:
Jul. 02, 1998
Jason R Carlesi, San Diego, CA (US);
Shahryar Rokni, Carlsbad, CA (US);
Mengxiong Gong, San Marcos, CA (US);
Tom A Watson, Carlsbad, CA (US);
Palash P Das, Vista, CA (US);
Michael C Binder, San Diego, CA (US);
Muljadi Tantra, San Diego, CA (US);
David J Tammadge, San Diego, CA (US);
Daniel G Patterson, Morganhill, CA (US);
Cymer, Inc., San Diego, CA (US);
Abstract
An excimer laser system with a fluorine control having a fixed volume inject bottle in which fluorine is injected prior to it being injected into the laser chamber. A manifold and feedback control system is provided to permit precise injection at rates approaching continuous fluorine injection. The system permits the laser to be operated in a small sweet spot as measured by a narrow range of charging voltage.