The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 08, 2000
Filed:
Nov. 06, 1996
Applicant:
Inventor:
J Brett Rolfson, Boise, ID (US);
Assignee:
Micron Display Technology, Inc., Boise, ID (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J / ; H01J / ;
U.S. Cl.
CPC ...
445 24 ; 445 50 ;
Abstract
A low temperature method of sharpening the emission tip of a field emission display includes the step of oxidizing the silicon substrate and the emission tip in an atmosphere of oxygen and ozone at temperatures below 800.degree. C. The oxidation step forms an oxide layer on the emission tip without significant flow of oxide or silicon during oxidation. The oxide layer is subsequently etched to expose the emission tip.