The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 01, 2000
Filed:
Mar. 31, 1999
Danniel Rcraw, Churan, TW;
Tsun-Ching Lin, Chu-Tong, TW;
Ren-Zhi Demg, Chu-Tong, TW;
Chin-Chuan Kuo, Hsin-Chu, TW;
Taiwan Semiconductor Manufacturing Company, Ltd, Hsin-Chu, TW;
Abstract
A circuit for use with optical inspection lamps, e.g., tungsten-halogen or Marco lamps, in semiconductor fabrication machines performing ADI and AEI operations, that will lower the operating voltage of the lamps when the machine is not being used by an operator, while providing full light intensity during optical inspections. The circuit is coupled into the Marco lamp power supply and contains two micro-switches, each containing two sets of switch contacts normally configured with one set closed and one set open to render one micro-switch closed providing the operating voltage to the lamp and the other open rendering the circuit inactive in this condition. The micro-switches have operating levers that cooperate with indexes which follow the position of cassette elevators that deliver the semiconductor wafers for processing and each of which has an 'up' and a 'down' position. When the two indexes are 'up', the machine is not in use, and each micro-switch will have its lever engaged closing their normally open contact sets which closes both micro-switches and introduces a resistor, coupled to the normally opened micro-switch, into the circuit causing its activation. Activation with the added resistance causes the lamp loading voltage to lower and the light intensity to decrease, extending the life of the lamp by decreasing its power during periods when it is not needed, while allowing the lamp to be left ON.