The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 01, 2000
Filed:
May. 21, 1998
Applicant:
Inventors:
Kenji Honda, Barrington, RI (US);
Taishih Maw, Fremont, CA (US);
Assignee:
Olin Microelectronic Chemicals, Inc., Norwalk, CT (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C11D / ; C11D / ;
U.S. Cl.
CPC ...
510175 ; 510176 ; 510255 ; 510259 ; 510264 ; 510504 ; 134-2 ; 134 38 ; 134 41 ; 134 42 ;
Abstract
A non-corrosive cleaning composition for removing plasma etching residues comprising water, at least one quaternary ammonium hydroxide, and at least one corrosion inhibitor selected from (i) quaternary ammonium silicates and (ii) catechol nucleus-containing oligomers having a molecular weight in the range of about 220 to about 5,000.