The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 03, 2000
Filed:
Dec. 01, 1996
Ban-Yaw Lee, Yun-Lin, TW;
Chen-Chin Chen, Miao-Li, TW;
Yue Tsang Hsu, Hsin-Chu, TW;
Reuy-Huang Huang, Hsin-Chu, TW;
Kun-Chih Huang, Hsin-Chu, TW;
Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;
Abstract
A Standard Mechanical Inter Face is described where a sensor causes a fan in a fan filter unit, attached to a Standard Mechanical Inter Face, to be turned on or off depending on the position of the door in semiconductor wafer equipment. An apparatus for realizing this and a method for its use are given. Two examples of sensors for realizing this invention are described. A preferred embodiment of the invention is the use of an infrared sensor placed within the Standard Mechanical Inter Face and containing an infrared transmitter and infrared receiver in one housing.