The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 28, 1999
Filed:
Feb. 05, 1997
Applicant:
Inventors:
Gregory S Ferguson, Austin, TX (US);
Christopher M Devany, Pflugerville, TX (US);
Assignee:
Motorola, Inc., Schaumburg, IL (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
438716 ; 438631 ; 438697 ; 118729 ;
Abstract
Beveled clamp fingers (48) are used in an etching system. The beveled top surfaces (40) of the clamp fingers allow etching species to attack more readily the layer being etched at locations near the beveled clamp fingers (48), thereby reducing the size of halo regions (622). In other embodiments, triangular clamp fingers (78) or clamp fingers (88) with rounded top surfaces can be used.