The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 14, 1999
Filed:
Mar. 26, 1997
Applicant:
Inventors:
Saburo Kamiya, Tokyo, JP;
Naoyuki Kobayashi, Tokyo, JP;
Assignee:
Nikon Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01K / ; G03B / ; G03B / ;
U.S. Cl.
CPC ...
702 56 ; 36452815 ; 2504922 ; 355 30 ; 355 53 ; 355 55 ; 355 77 ;
Abstract
An exposure apparatus includes an exposure system which transfers a pattern of a mask onto a substrate; a chamber in which the exposure system is housed; an air-conditioner which is associated with the chamber and which air-conditions the chamber; and a noise eliminating device which is arranged between the exposure system and the air-conditioner and which eliminates at least a portion of the noise components near a resonant frequency of the exposure system from noise that is generated in the air-conditioner.