The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 07, 1999
Filed:
Dec. 17, 1998
Schott Glas, Mainz, DE;
Abstract
An apparatus is used to make microchips in which monochromatic light issuing from a light source is guided to a photomask that is held in a predetermined position in which the monochromatic light rays are combined with a lens system and directed to a wafer. The supporting plate is a rectangular plate made from glass or glass-ceramic material that has a receptacle for holding the photomask. In order to provide a supporting plate according to the invention with weight that is as small as possible and with a dynamic stiffness as high as possible, the rectangular plate is provided with front-edge elongated blind holes extending in side edge regions along both long edges of the rectangular plate in the plane of the plate, as well as with other recesses. The elongated blind holes are preferably thin-walled and have a box-like shape.