The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 07, 1999
Filed:
Jul. 22, 1998
Applicant:
Inventor:
Mark J Greisz, Vancouver, WA (US);
Assignee:
SEH America, Inc., Vancouver, WA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B / ;
U.S. Cl.
CPC ...
356138 ; 356143 ; 356144 ; 356146 ; 356401 ;
Abstract
A method for laser marking semiconductor wafers wherein marking errors attributable to the laser marking tool are measured for each of the anticipated marking fields. A weighted average error is then calculated, and a correction based thereon is entered into the control mechanism of the laser marking tool. The method of the invention reduces downtime between jobs by eliminating the need to recalibrate the laser marking tool between jobs.