The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 07, 1999
Filed:
Jan. 31, 1997
Kengo Mizosaki, Kumamoto, JP;
Masaaki Yoshida, Kumamoto-ken, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
This invention relates to a processing apparatus having an object holding means for holding an object to be processed, a processing chamber for housing the object to be processed and the object holding means, an ultraviolet irradiation means for irradiating ultraviolet rays on the object to be processed, an ultraviolet irradiation means chamber incorporating the ultraviolet irradiation means, an opening/closing means for opening/closing an opening for allowing the processing chamber to communicate with the ultraviolet irradiation means chamber, a first exhaust means for exhausting ozone which is produced upon irradiation of the ultraviolet ray by the ultraviolet irradiation means and present in the processing chamber, and a second exhaust means for exhausting ozone produced in the ultraviolet irradiation means chamber, and a processing method using the same.