The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 16, 1999
Filed:
Jul. 01, 1996
Randy Lee Thomas, Orange, CA (US);
Packard Hughes Interconnect Co., Irvine, CA (US);
Abstract
The invention includes an electrostatic chuck having surface topography and a method of making the same including the steps of providing a first insulative layer and a conductive layer laminated thereto. The first insulative layer is secured to a pedestal. A second insulative layer is deposited over the conductive layer and the first and second insulative layer and the copper layer are laminated together by a mandrel. The mandrel has recesses formed therein to produce an electrostatic chuck having a surface topography including raised features. The mandrel may have an annular groove defined therein for producing a raised gasket defined in the second insulative layer.