The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 16, 1999
Filed:
Aug. 08, 1997
Applicant:
Inventors:
Ajay Singhal, Santa Clara, CA (US);
Yuri Uritsky, Newark, CA (US);
Patrick D Kinney, Coon Rapids, MN (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
438-7 ; 438 12 ; 438 14 ; 438 16 ; 36446828 ; 356375 ;
Abstract
A method and apparatus for accurately transforming coordinates within a first coordinate system (e.g., a two-dimensional coordinate system associated with a substrate (or portion thereof)) into coordinates in a second coordinate system (e.g., a three-dimensional coordinate system of substrate (or portion thereof) tilted within a wafer analysis tool.
Singhal, Ajay. (1999). Method and apparatus for transforming a substrate coordinate system into (U.S. Patent No. 5985680). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5985680
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile