The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 16, 1999
Filed:
Aug. 21, 1997
Applicant:
Inventor:
Shyi-Long Shy, Hsin-Chu, TW;
Assignee:
United Microelectronics Corp., Hsinchu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03C / ;
U.S. Cl.
CPC ...
430296 ; 430311 ;
Abstract
A method of preparing a surface for exposure to an electron beam includes forming a water soluble self-acid-doped conducting polyaniline material. The water soluble self-acid-doped conducting polyaniline material may be poly(aniline-co-N-propanesulfonic acid aniline). The polyaniline material may be mixed with polyvinyl alcohol and applied to a surface prior to subjecting the surface to an electron beam. The electron beam is then transmitted through the material and onto the surface, with the polyaniline material acting as a charge dissipation layer.