The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 09, 1999
Filed:
Jan. 13, 1998
Alexander Kalnitsky, San Francisco, CA (US);
Alan Kramer, Berkeley, CA (US);
Vito Fabbrizio, El Cerrito, CA (US);
Giovanni Gozzini, Berkeley, CA (US);
Bhusian Guptz, Palo Alto Santa Clara, CA (US);
Marco Sabatini, Berkeley, CA (US);
STMicroelectronics, Inc., Carrollton, TX (US);
Abstract
A variable capacitor in a semiconductor device is described in which the capacitance is varied by the movement of a dielectric material in the space between the plates of the capacitor in response to an external stimulus. A method of making such a variable capacitor is also described in which the capacitor is built in a layered structure with the top layer including a portion of dielectric material extending into the space between the capacitor plates. After formation of the top layer, an intermediate layer is etched away to render the top layer flexible to facilitate movement of the dielectric material in the space between the capacitor plates.