The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 09, 1999
Filed:
Dec. 26, 1996
Applicant:
Inventors:
Guo Hua Shen, Chigasaki, JP;
Nozomu Takagi, Chigasaki, JP;
Toshihiro Terasawa, Chigasaki, JP;
Tsuyoshi Kotani, Chigasaki, JP;
Hiroyuki Kinpara, Chigasaki, JP;
Katsuji Nakajima, Chigasaki, JP;
Hiroyuki Miho, Chigasaki, JP;
Assignee:
Nihon Shinku Gijutsu Kabushiki Kaisha, Kanagawa-ken, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F04B / ; F04F / ; H01J / ;
U.S. Cl.
CPC ...
417 49 ; 313-7 ;
Abstract
A sputter ion pump in which the ratio of the length L to the diameter D of each anode cell forming a multi-cell anode inserted between two cathodes is defined within a certain range, thereby increasing a critical vacuum level to be evacuated and achieving a higher exhaust speed.
Shen, Guo. (1999). Anode-cathode structure for ion pump having specifically determined (U.S. Patent No. 5980212). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5980212
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile