The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 26, 1999
Filed:
May. 19, 1997
Applicant:
Inventors:
Nobuharu Noji, Fujisawa, JP;
Koichi Kido, Yokohama, JP;
Assignee:
Ebara Corporation, Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F04B / ;
U.S. Cl.
CPC ...
417-2 ;
Abstract
A vacuum pump control system is used for controlling a plurality of vacuum pumps comprising at least one type of cryopump, turbomolecular pump, cryoturbo pump, and dry pump such as a Roots type vacuum pump. The vacuum pump control system for controlling a plurality of vacuum pumps, comprises a host computer; a plurality of vacuum pump controllers connected respectively to said vacuum pumps; and a network control unit for transmitting information between the host computer and the vacuum pump controllers. The vacuum pump controllers are connected in parallel to the network control unit by respective communication lines.